Voronoi Diagram Based Heterogeneous Circuit Layout Centerline Extraction for Mask Verification
Journal
Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC
Journal Volume
2022-January
Pages
172-177
Date Issued
2022
Author(s)
Abstract
Modern circuit layout centerline extraction is an essential step in estimating the parasitic inductance and verifying the layout performance in mask verification. As the continued feature size shrinking and the complexity of modern circuit design keeps growing, heterogeneous layout centerline extraction has become even more challenging. In this paper, we first formulate a Voronoi diagram-based problem transformation to collect all centerline points. Then, a graph-based initial centerline generation algorithm is presented to handle all invalid centerline points effectively. Finally, a heterogeneity-aware centerline optimization method is proposed to generate optimized design-violation-free centerline results for irregular structures. Compared with the state-of-the-art commercial 3D-RC parasitic parameter extraction tool RCExplorer and the 1st place in the 2019 EDA Elite Challenge Contest, experimental results show that our algorithm achieves the best average precision ratio of 99.7% on centerline extraction while satisfying all design constraints. © 2022 IEEE.
Other Subjects
Computer aided design; Extraction; Graphic methods; Integrated circuit layout; Integrated circuit manufacture; Timing circuits; Centerline extraction; Centerlines; Circuit designs; Feature sizes; Generation algorithm; Graph-based; Parasitic inductances; Performance; Problem transformations; Voronoi diagrams; Computational geometry
Type
conference paper