https://scholars.lib.ntu.edu.tw/handle/123456789/632284
標題: | Critical Role of GIDL Current for Erase Operation in 3D Vertical FeFET and Compact Long-term FeFET Retention Model | 作者: | Mo F Xiang J Mei X Sawabe Y Saraya T Hiramoto T Su C.-J VITA PI-HO HU Kobayashi M. |
公開日期: | 2021 | 卷: | 2021-June | 來源出版物: | Digest of Technical Papers - Symposium on VLSI Technology | 摘要: | We have investigated and revealed the critical role of GIDL current for efficient erase operation in 3D vertical FeFET by developing proper test structures and demonstrated a compact long-term FeFET retention model based on nucleation-limited switching, for the first time. We also proposed novel FeFET process for low voltage operation by controlling oxygen intrusion into the gate stack. This work contributes to the realization of high-density and low-power 3D vertical FeFET. © 2021 JSAP |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85125487567&partnerID=40&md5=5dee8236606fe991655ff8024fa50ff1 https://scholars.lib.ntu.edu.tw/handle/123456789/632284 |
ISSN: | 7431562 |
顯示於: | 電機工程學系 |
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