https://scholars.lib.ntu.edu.tw/handle/123456789/632284
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Mo F | en-US |
dc.contributor.author | Xiang J | en-US |
dc.contributor.author | Mei X | en-US |
dc.contributor.author | Sawabe Y | en-US |
dc.contributor.author | Saraya T | en-US |
dc.contributor.author | Hiramoto T | en-US |
dc.contributor.author | Su C.-J | en-US |
dc.contributor.author | VITA PI-HO HU | en-US |
dc.contributor.author | Kobayashi M. | en-US |
dc.creator | Mo F;Xiang J;Mei X;Sawabe Y;Saraya T;Hiramoto T;Su C.-J;Hu V.P.-H;Kobayashi M. | - |
dc.date.accessioned | 2023-06-09T07:46:49Z | - |
dc.date.available | 2023-06-09T07:46:49Z | - |
dc.date.issued | 2021 | - |
dc.identifier.issn | 7431562 | - |
dc.identifier.uri | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85125487567&partnerID=40&md5=5dee8236606fe991655ff8024fa50ff1 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/632284 | - |
dc.description.abstract | We have investigated and revealed the critical role of GIDL current for efficient erase operation in 3D vertical FeFET by developing proper test structures and demonstrated a compact long-term FeFET retention model based on nucleation-limited switching, for the first time. We also proposed novel FeFET process for low voltage operation by controlling oxygen intrusion into the gate stack. This work contributes to the realization of high-density and low-power 3D vertical FeFET. © 2021 JSAP | - |
dc.relation.ispartof | Digest of Technical Papers - Symposium on VLSI Technology | - |
dc.title | Critical Role of GIDL Current for Erase Operation in 3D Vertical FeFET and Compact Long-term FeFET Retention Model | en_US |
dc.type | conference paper | en |
dc.identifier.scopus | 2-s2.0-85125487567 | - |
dc.relation.journalvolume | 2021-June | - |
item.fulltext | no fulltext | - |
item.cerifentitytype | Publications | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.grantfulltext | none | - |
item.openairetype | conference paper | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Program in Semiconductor Device, Material, and Hetero-integration | - |
crisitem.author.orcid | 0000-0002-6216-214X | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | Graduate School of Advanced Technology | - |
Appears in Collections: | 電機工程學系 |
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