https://scholars.lib.ntu.edu.tw/handle/123456789/633756
標題: | A low-noise three-axis piezoelectric MEMS accelerometer for condition monitoring | 作者: | Gong, Xuewen WEN-JONG WU Liao, Wei Hsin |
關鍵字: | Aerosol deposition | Low noise | MEMS piezoelectric | Three-axis accelerometer | 公開日期: | 1-一月-2020 | 卷: | 11379 | 來源出版物: | Proceedings of SPIE - The International Society for Optical Engineering | 摘要: | Prognostics and health management (PHM) is a crucial measure to minimize the financial loss caused by downtime and damage in smart factories. To prevent the failures of industrial machines, a low-noise three-axis piezoelectric accelerometer in small scale is proposed to measure the vibration parameters for PHM application. It consists of a middle tungsten proof mass and 4 composite beams, which includes PZT and stainless steel layers. Simulation validates the principle of 3-axis measurement and gives the sensitivities of 0.714 mV/g, 0.714 mV/g and 1.72 mV/g for x-, y- and zaxis sensing. Calculated mechanical-thermal noise is 0.4 μg/√Hz, much lower than the typical noise of a commercial capacitive MEMS accelerometer. The designed sensor is fabricated with a metal-MEMS process and aerosol deposition method with the resonant frequency around 4.11 kHz. The testing results of x- and y-axis sensitivities, 0.5541 mV/g and 0.5420 mV/g, show the effectiveness of dual-axis measurement. In the end, the study analyzes hypotheses for the coupling of 3-axis measurement and proposes the improvement direction in further study. |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/633756 | ISBN: | 9781510635357 | ISSN: | 0277786X | DOI: | 10.1117/12.2559021 |
顯示於: | 工程科學及海洋工程學系 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。