https://scholars.lib.ntu.edu.tw/handle/123456789/633797
標題: | 29 GHz single-mode vertical-cavity surface-emitting lasers passivated by atomic layer deposition | 作者: | Cheng, Hao Tien Qiu, Junyi Peng, Chun Yen Kuo, Hao Chung Feng, Milton CHAO-HSIN WU |
公開日期: | 19-十二月-2022 | 卷: | 30 | 期: | 26 | 來源出版物: | Optics Express | 摘要: | The fabrication processes of high-speed oxide-confined single-mode (SM)-verticalcavity surface-emitting lasers (VCSELs) are complex, costly, and often held back by reliability and yield issues, which substantially set back the high-volume processing and mass commercialization of SM-VCSELs in datacom or other applications. In this article, we report the effects of Al2O3 passivation films deposited by atomic layer deposition (ALD) on the mesa sidewalls of high-speed 850-nm SM-VCSELs. The ALD-deposited film alleviates the trapping of carriers by sidewall defects and is an effective way to improve the performance of SM-VCSELs. The ALD-passivated SM-VCSELs showed statistically significant static performance improvements and reached a believed to be record-breaking SM-modulation bandwidth of 29.1 GHz. We also propose an improved microwave small-signal equivalent circuit model for SM-VCSELs that accounts for the losses attributed to the mesa sidewalls. These findings demonstrate that ALD passivation can mitigate processing-induced surface damage, enhance the performance of SM-VCSELs, and enable mass production of high-quality SM-VCSELs for mid- to long-reach optical interconnects. |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/633797 | ISSN: | 1094-4087 | DOI: | 10.1364/OE.474930 |
顯示於: | 電機工程學系 |
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