https://scholars.lib.ntu.edu.tw/handle/123456789/636091
標題: | A Thru-Reflect-Series-Resistance (TRS) Calibration for Cryogenic Device Characterization in 40-nm CMOS Technology | 作者: | Chen, Yi Ting Huang, Ian Lin, Min Jui Chuang, Shu Yan Ho, Hua Ling Hsu, Kai Syang Lin, Pin Yu Chen, Sih Ying LIANG-HUNG LU SHIH-YUAN CHEN JIUN-YUN LI JUN-CHAU CHIEN |
關鍵字: | calibration | cryogenic temperature | device modeling | LRRM | qubits | series resistance | TRL | vector network analyzer | 公開日期: | 1-一月-2023 | 卷: | 2023-June | 來源出版物: | IEEE MTT-S International Microwave Symposium Digest | 摘要: | This paper presents an on-wafer thru-reflect-series-resistance (TRS) VNA calibration in CMOS for device characterization at cryogenic temperatures. The algorithm resembles LRRM calibration while requiring only three calibration structures. The series-resistor standard is implemented using the polysilicon layer in the CMOS process, and its temperature dependency is characterized. We validate the calibration results using a 40-nm NMOS from DC-20 GHz using a cryogenic probe station down to 4K. |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/636091 | ISBN: | 9798350347647 | ISSN: | 0149645X | DOI: | 10.1109/IMS37964.2023.10188078 |
顯示於: | 電機工程學系 |
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