https://scholars.lib.ntu.edu.tw/handle/123456789/636610
標題: | Graph-Based Simultaneous Placement and Routing for Two-Dimensional Directed Self-Assembly Technology | 作者: | Chen, Wei Hsu YAO-WEN CHANG |
公開日期: | 1-一月-2023 | 卷: | 2023-July | 來源出版物: | Proceedings - Design Automation Conference | 摘要: | Two-dimensional directed self-assembly (2D-DSA) is an emerging lithography technology for advanced process nodes. We can determine the orientations of double posts to guide block copolymers to form feasible 2D guiding template patterns by the 2D-DSA process. This paper presents the first work to handle the 2D-DSA simultaneous placement and routing problem. We first propose a novel graph to model feasible guiding templates with a constant-time update scheme for each double-post assignment. Based on a graph model, we then present an algorithm for 2D-DSA simultaneous placement and routing, with a broadcast-based cost function for 2D-DSA cell placement and a graph-based scheme for DSA-compliant routing. Finally, we employ a strongly effective region property to minimize the cuts in the final layout. Experimental results show that our algorithm can efficiently generate a 2D-DSA placement and routing solution with high routability and a low cut number. |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/636610 | ISBN: | 9798350323481 | ISSN: | 0738100X | DOI: | 10.1109/DAC56929.2023.10247804 |
顯示於: | 電信工程學研究所 |
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