原子層沉積之氣相聚合高分子/無機超晶格複合薄膜之熱電性質與阻氣性質研究

Project title

原子層沉積之氣相聚合高分子/無機超晶格複合薄膜之熱電性質與阻氣性質研究

Internal ID

111-2221-E-002-026-MY3

Principal Investigator

Start Date

August 1, 2022

End Date

July 31, 2023

Organizations

Materials Science and Engineering

Partner Organizations

National Science and Technology Council