https://scholars.lib.ntu.edu.tw/handle/123456789/69767
Title: | A Novel Method for In-Situ Monitoring of the Thickness of a Silicon Wafer during Wet Etching | Authors: | Lee, Chi Yuan Chang, Pei Zen Chen, Yung Yu Dai, Ching Liang Wang, Xuan Yu Chen, Ping Hei Lee, Shuo Jen |
Issue Date: | Oct-2005 | Journal Volume: | 18 | Journal Issue: | 2 | Start page/Pages: | 71-82 | Source: | Sensors and Materials | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/200269 |
Appears in Collections: | 機械工程學系 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.