Highly stable and selective H2 gas sensors based on light-activated a-IGZO thin films with ZIF-8 selective membranes
Journal
Sensors and Actuators B: Chemical
Journal Volume
417
Start Page
136175
ISSN
0925-4005
Date Issued
2024-10-15
Author(s)
Wen-Chun Huang
Ying Li
Nian-Ho Chang
Wei-Jie Hong
Sin-Ying Wu
Su-Yu Liao
Chih-Min Wang
Chun-Ying Huang
DOI
10.1016/j.snb.2024.136175
Abstract
Metal-organic frameworks (MOFs) have emerged as promising selective membranes in oxide semiconductor gas sensors. However, their susceptibility to high temperatures poses significant challenges to the long-term stability of gas sensors. This paper proposes a novel approach for improving long-term stability by employing a light-activated technique on amorphous InGaZnO (a-IGZO) films with a ZIF-8 membrane. Under 360 nm LED illumination, UV light can penetrate the ZIF membrane and be absorbed by a-IGZO, leading to a substantial number of photogenerated carriers in the IGZO film for gas reaction. The a-IGZO film with a ZIF-8 membrane shows an excellent selective response for H2 over CO, NO2, and O3. This light-activated film maintains a gas response comparable to that of thermal-activated counterparts while significantly improving its long-term stability. Our findings underscore the potential of light-activated a-IGZO sensors as a platform for future integration with an MOF selective membrane, ensuring long-term stability.
Subjects
A-IGZO
Gas sensors
Light activation
Metal-organic frameworks
ZIF-8
SDGs
Publisher
Elsevier BV
Type
journal article