Omnidirectional 3-D AFM Integrated With a Rotary Stage for High-Precision Sidewall Structure
Journal
IEEE Transactions on Instrumentation and Measurement
Journal Volume
73
Start Page
1
End Page
13
ISSN
0018-9456
1557-9662
Date Issued
2024
Author(s)
SDGs
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Type
journal article