An Efficiency Scanning Strategy Based on Online Smoothing Variable-Speed for AFM with a Rotating Stage
Part Of
Proceedings of the American Control Conference
Start Page
4308
End Page
4313
ISBN (of the container)
979-835038265-5
Date Issued
2024-07-10
Author(s)
Abstract
Atomic force microscopy (AFM) has found wide application in various fields, including nanotechnology, nanomanipulation, and bioscience. Nevertheless, traditional raster or non-raster trajectories do not allow for speed variations in specific regions but are predetermined, resulting in an efficiency shortfall. Addressing this limitation, this paper introduces a novel scanning strategy with online detection of critical regions during the backward scan. This allows for self-adjustment of scanning speed during the forward scan, as well as ensuring the continuity of acceleration throughout the scanning process. The proposed online smoothing variable-speed (OSVS) method lets the AFM meticulously scan recognized critical regions at a relatively low speed while swiftly traversing uninteresting areas at a much higher speed. This approach reduces scanning time while maintaining imaging performance. In experiments, the developed method efficiently scans a grating sample with higher sidewalls using an AFM equipped with a sample rotating stage, resulting in high-precision scan results.
Event(s)
2024 American Control Conference, ACC 2024 Toronto
SDGs
Publisher
IEEE
Type
conference paper