Study on the performance of InGaN-based micro-LED by plasma etching combined with ion implantation process
Journal
Next Nanotechnology
Series/Report No.
Next Nanotechnology
Journal Volume
7
Start Page
100
End Page
101
ISSN
2949-8295
Date Issued
2025
Author(s)
Yun-Cheng Hsu
Yu-Hsuan Hsu
Ming Hsien Wu
Hao Chung Kuo
Dong-Sing Wuu
Ching-Lien Hsiao
Ray-Hua Horng
DOI
10.1016/j.nxnano.2024.100101
SDGs
Publisher
Elsevier BV
Type
journal article