CMOS-MEMS Resoswitches—Design, Modeling, and Characterization
Journal
Journal of Microelectromechanical Systems
ISSN
10577157
Date Issued
2025
Author(s)
Tsai, Chun-Pu
Abstract
Recent advancements in MEMS have spotlighted micromechanical resoswitches as key components for energy-efficient wireless communication systems such as zero-standby power receivers. However, progress has been hindered by the absence of a model that captures their inherent nonlinear dynamics. This work fills that gap by presenting a detailed dynamical model of MEMS resoswitches, combining Duffing and van der Pol nonlinearities with surface interaction forces based on the generalized Derjaguin-Muller-Toporov (DMT) model. It also incorporates a refined Wexler-based electrical contact model modified by Mikrajuddin to account for contact resistance in hot switching scenarios. Both analytical and numerical methods are employed to explore the nonlinear behaviors in depth. A 125-kHz comb-driven folded-beam resoswitch, fabricated via a 0.35-μm CMOS-MEMS process, serves as the experimental platform for validating the model and quantifying imperfections and contact effects. The resulting model provides deep physical insights and serves as a foundational tool for optimizing resoswitch design and performance. Its applicability extends beyond this specific platform to broader vibro-impact MEMS devices in sensing and communication systems.
Subjects
nonlinear contact dynamics
resonant switch
resoswitch
RF MEMS
Vibro-impact resonator
wake-up receiver
zero-standby
SDGs
Publisher
Institute of Electrical and Electronics Engineers Inc.
Type
journal article