Metasurfaces for Bulk Suppression and Wavelength-Dependent Mid-Infrared Imaging
Journal
International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers
Journal Issue
2025
Start Page
215
End Page
218
ISSN
21670013
Date Issued
2025
Author(s)
Abstract
Metasurfaces have emerged as powerful platforms for manipulating light at the subwavelength scale, with promising applications in imaging, sensing, and on-chip photonics. However, extending their functionality into the mid-infrared (MIR) region remains challenging due to the strong phonon absorption of silicon dioxide (SiO2). In this work, we present a grating-engineered metal-insulator-metal (MIM) metasurface that effectively suppresses the bulk absorption of SiO2 and enhances plasmonic resonance in the MIR range. By introducing a grating structure into the nanorod antennas, we mitigate SiO2 phonon loss and achieve tunable, high-efficiency plasmonic absorption. This design not only preserves the advantages of wafer-scale fabrication but also enables wavelength-selective infrared imaging, as demonstrated through letter-pattern visualization. Our results provide a practical and scalable route for the development of high-performance MIR metasurfaces using standard semiconductor processes.
Event(s)
23rd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2025, Orlando, 29 June 2025 - 3 July 2025
Subjects
bulk suppression
grating
Metasurfaces
mid-infrared imaging
Publisher
Institute of Electrical and Electronics Engineers Inc.
Type
conference paper