Quantum Metrology of Fluxonium Superconducting Qubits for Scalable Quantum Information Processing
Part Of
CLEO: Applications and Technology - Proceedings CLEO 2025
ISBN (of the container)
9781957171500
ISBN
9781957171500
Date Issued
2025
Author(s)
Lu, Yuan-To
Lin, Wei-Chen
Lu, Ssu-Yun
Ho, Ming-Hsuan
Wang, Chin-Yang
Liu, Chun-Ting
Lin, Chia-Yu
Yong, Yu-Yan Au
Chang, Kai-Hao
Lee, Ya-Ti Chang
Lin, Yen-Hsiang
Huang, Haw-Tyng
Chen, Chia-Hsun
Abstract
Fluxonium superconducting qubits have been fabricated on sapphire substrates using an e-beam lithography-based Dolan Bridge technique. To enhance process control and improve yield, the quantum circuit fabrication is monitored through a non-destructive, in-line X-ray metrology method.
Event(s)
2025 CLEO: Applications and Technology, CLEO-AT 2025, 4 May 2025 - 9 May 2025, Long Beach
Publisher
Optical Society of America
Type
conference paper