Semiconductor-based wafer-scale highly ordered metallic nanostructured arrays for sustainable energy and sensing technologies
Journal
Materials Science in Semiconductor Processing
Journal Volume
198
Start Page
109769
ISSN
13698001
Date Issued
2025-11-01
Author(s)
Altama, Alfreda Krisna
Haji, Helmi Son
Kong, Fan-Hua
Chang, Ting-Hao
Hubert, Bryan
Fan, Tsung-Yun
Yeh, Tsu-Hao
Wang, Jun-Ting
Kaswan, Kuldeep
Njoto, Hansen Kurniawan
Yiu, Pakman
Lee, San-Liang
Wang, Sea-Fue
Hwang, Bing Joe
Chang, Shery
Wang, Yun-Che
Chu, Jinn P.
Abstract
Photolithography remains the dominant technique for fabricating photoresist templates in semiconductor nanodevice manufacturing, though each template typically produces only one nanostructure type. This paper provides a comprehensive review (2021–2025) of lithography and sputter deposition methods for wafer-scale fabrication of diverse highly ordered nanostructure arrays, focusing on three key architectures: metal mesh (MM), metallic nanotube arrays (MeNTA), and metallic pillar arrays (MPA). These structures exhibit exceptional surface area, structural versatility, and durability across applications. The MeNTA fabrication approach offers enhanced eco-friendliness through reduced chemical processing and low-temperature fabrication, coupled with geometrically tunable features (circular, triangular, and rhombic cross-sections). These advantages position MeNTAs as ideal platforms for advanced sensing technologies, including SERS-based biosensing of exosomes and analytes, glucose detection, H2 gas sensing, magnetic field sensing using Fe3O4-functionalized arrays. Furthermore, the structural flexibility of MM, MeNTA, and MPA architectures enables applications spanning: biosensing and nanohybrid devices, sustainable energy solutions (lithium-based batteries, triboelectric nanogenerators [TENG], supercapacitors), emerging fields (quantum computing, metasurfaces, flexible electronics). By evaluating current progress and future prospects, we highlight the transformative potential of these nanostructured materials in developing eco-friendly, energy-efficient technologies.
Subjects
Biosensing
Far infrared emission
Flexible substrate
Metallic meshes
Metallic nanotube array
Metallic pillar array
Metasurfaces
Triboelectric nanogenerators
Publisher
Elsevier Ltd
Type
review article