https://scholars.lib.ntu.edu.tw/handle/123456789/79815
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Lee, Chi-Yuan | en_US |
dc.contributor.author | Cheng, Ying-Chou | en_US |
dc.contributor.author | Chen, Yung-Yu | en_US |
dc.contributor.author | Chang, Pei-Zen | en_US |
dc.contributor.author | Wu, Tsung-Tsong | en_US |
dc.contributor.author | Chen, Ping-Hei | en_US |
dc.contributor.author | Chen, Wen-Jong | en_US |
dc.contributor.author | PING-HEI CHEN | en_US |
dc.contributor.author | PEI-ZEN CHANG | en_US |
dc.contributor.author | TSUNG-TSONG WU | en_US |
dc.creator | Lee, Chi-Yuan; Cheng, Ying-Chou; Chen, Yung-Yu; Chang, Pei-Zen; Wu, Tsung-Tsong; Chen, Ping-Hei; Chen, Wen-Jong; Pao, Shih-Yung | - |
dc.date | 2004 | en |
dc.date.accessioned | 2009-01-21T08:01:52Z | - |
dc.date.accessioned | 2018-06-29T00:08:44Z | - |
dc.date.available | 2009-01-21T08:01:52Z | - |
dc.date.available | 2018-06-29T00:08:44Z | - |
dc.date.issued | 2004 | - |
dc.identifier.uri | http://ntur.lib.ntu.edu.tw//handle/246246/106987 | - |
dc.format | application/pdf | en |
dc.format.extent | 290558 bytes | - |
dc.format.mimetype | application/pdf | - |
dc.language | en | en |
dc.language.iso | en_US | - |
dc.relation | Japanese Journal of Applied Physics 43 (6A): 3611-3617 | en |
dc.relation.ispartof | Japanese Journal of Applied Physics | en_US |
dc.title | In Situ Monitoring of Silicon Membrane Thickness during Wet Etching using a Surface Acoustic Wave Sensor | en |
dc.identifier.doi | 10.1143/JJAP.43.3611 | - |
dc.identifier.scopus | 2-s2.0-4344581335 | - |
dc.identifier.isi | WOS:000222503400073 | - |
dc.relation.pages | 3611-3617 | - |
dc.relation.journalissue | 43 | - |
dc.identifier.uri.fulltext | http://ntur.lib.ntu.edu.tw/bitstream/246246/106987/1/11.pdf | - |
item.languageiso639-1 | en_US | - |
item.grantfulltext | open | - |
item.fulltext | with fulltext | - |
crisitem.author.dept | Applied Mechanics | - |
crisitem.author.dept | Mechanical Engineering | - |
crisitem.author.dept | Applied Mechanics | - |
crisitem.author.orcid | 0000-0002-4054-6791 | - |
crisitem.author.orcid | 0000-0002-8073-9344 | - |
crisitem.author.orcid | 0000-0002-4054-6791 | - |
crisitem.author.parentorg | College of Engineering | - |
crisitem.author.parentorg | College of Engineering | - |
crisitem.author.parentorg | College of Engineering | - |
顯示於: | 應用力學研究所 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。