https://scholars.lib.ntu.edu.tw/handle/123456789/79815
Title: | In Situ Monitoring of Silicon Membrane Thickness during Wet Etching using a Surface Acoustic Wave Sensor | Authors: | Lee, Chi-Yuan Cheng, Ying-Chou Chen, Yung-Yu Chang, Pei-Zen Wu, Tsung-Tsong Chen, Ping-Hei Chen, Wen-Jong PING-HEI CHEN PEI-ZEN CHANG TSUNG-TSONG WU |
Issue Date: | 2004 | Journal Issue: | 43 | Start page/Pages: | 3611-3617 | Source: | Japanese Journal of Applied Physics | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/106987 | DOI: | 10.1143/JJAP.43.3611 |
Appears in Collections: | 應用力學研究所 |
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