https://scholars.lib.ntu.edu.tw/handle/123456789/82265
Title: | Real-time equipment health evaluation and dynamic preventive maintenance | Authors: | Chen, Argon Guo, R.S. Wu, G.S. |
Issue Date: | Sep-2000 | Start page/Pages: | - | Source: | The Ninth International Symposium on Semiconductor Manufacturing, 2000 | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/2007041908551533 | Other Identifiers: | N/A | DOI: | 10.1109/ISSM.2000.993691 |
Appears in Collections: | 工業工程學研究所 |
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00993691.pdf | 507.51 kB | Adobe PDF | View/Open |
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