Issue Date | Title | Author(s) | Source | scopus | WOS | Fulltext/Archive link |
---|---|---|---|---|---|---|
2001 | Ultra-deep LIGA process and its applications | Cheng, Y.; Shew, B.-Y.; Chyu, M.K.; Chen, P.H.; PING-HEI CHEN | Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment |