https://scholars.lib.ntu.edu.tw/handle/123456789/155966| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Chen, Tze Chiang | en |
| dc.contributor.author | Peng, Cheng-Yi | en |
| dc.contributor.author | Tseng, Chih-Hung | en |
| dc.contributor.author | Liao, Ming-Han | en |
| dc.contributor.author | Chen, Mei-Hsin | en |
| dc.contributor.author | Wu, Chih-I | en |
| dc.contributor.author | Chern, Ming-Yau | en |
| dc.contributor.author | Tzeng, Pei-Jer | en |
| dc.contributor.author | Liu, Chee Wee | en |
| dc.creator | Chen, Tze Chiang; Peng, Cheng-Yi; Tseng, Chih-Hung; Liao, Ming-Han; Chen, Mei-Hsin; Wu, Chih-I; Chern, Ming-Yau; Tzeng, Pei-Jer; Liu, Chee Wee | - |
| dc.date | 2007 | en |
| dc.date.accessioned | 2009-03-25T09:20:25Z | - |
| dc.date.accessioned | 2018-07-06T16:53:00Z | - |
| dc.date.available | 2009-03-25T09:20:25Z | - |
| dc.date.available | 2018-07-06T16:53:00Z | - |
| dc.date.issued | 2007 | - |
| dc.identifier.uri | http://ntur.lib.ntu.edu.tw//handle/246246/148250 | - |
| dc.identifier.uri | http://ntur.lib.ntu.edu.tw/bitstream/246246/148250/1/79.pdf | - |
| dc.format | application/pdf | en |
| dc.format.extent | 605045 bytes | - |
| dc.format.mimetype | application/pdf | - |
| dc.language | en | en |
| dc.language.iso | en_US | - |
| dc.relation | IEEE Transactions on Electron Devices 54 (4): 759-766 | en |
| dc.relation.ispartof | IEEE Transactions on Electron Devices | - |
| dc.title | Characterization of the Ultrathin HfO2 and Hf-Silicate Films Grown by Atomic Layer Deposition | en |
| dc.type | journal article | en |
| dc.identifier.doi | 10.1109/TED.2007.892012 | - |
| dc.identifier.isi | WOS:000245327900019 | - |
| item.fulltext | with fulltext | - |
| item.grantfulltext | open | - |
| dc.relation.pages | 759-766 | - |
| dc.relation.journalvolume | 54 | - |
| dc.relation.journalissue | 4 | - |
| dc.identifier.uri.fulltext | http://ntur.lib.ntu.edu.tw/bitstream/246246/148250/1/79.pdf | - |
| item.grantfulltext | open | - |
| item.languageiso639-1 | en_US | - |
| item.fulltext | with fulltext | - |
| item.openairetype | journal article | - |
| item.cerifentitytype | Publications | - |
| item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
| crisitem.author.dept | Photonics and Optoelectronics | - |
| crisitem.author.dept | Electrical Engineering | - |
| crisitem.author.dept | Physics | - |
| crisitem.author.dept | Electronics Engineering | - |
| crisitem.author.dept | Photonics and Optoelectronics | - |
| crisitem.author.dept | Electrical Engineering | - |
| crisitem.author.dept | Center for Condensed Matter Sciences | - |
| crisitem.author.dept | MediaTek-NTU Research Center | - |
| crisitem.author.dept | Center for Artificial Intelligence and Advanced Robotics | - |
| crisitem.author.orcid | 0000-0003-2942-4520 | - |
| crisitem.author.orcid | 0000-0003-3613-7511 | - |
| crisitem.author.orcid | 0000-0002-7623-5274 | - |
| crisitem.author.orcid | 0000-0002-6439-8754 | - |
| crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
| crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
| crisitem.author.parentorg | College of Science | - |
| crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
| crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
| crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
| crisitem.author.parentorg | Others: University-Level Research Centers | - |
| crisitem.author.parentorg | Others: University-Level Research Centers | - |
| crisitem.author.parentorg | Others: University-Level Research Centers | - |
| Appears in Collections: | 電機工程學系 | |
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