https://scholars.lib.ntu.edu.tw/handle/123456789/293604
Title: | A process for the formation of submicron V-gate by micromachined V-grooves using GaInP/GaAs selective etching technique | Authors: | Chiu, H.-W. Ho, N.-S. Lu, S.-S. SHEY-SHI LU |
Issue Date: | 2001 | Journal Volume: | 22 | Journal Issue: | 9 | Start page/Pages: | 420-422 | Source: | IEEE Electron Device Letters | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0035446925&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/293604 |
DOI: | 10.1109/55.944326 |
Appears in Collections: | 電機工程學系 |
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