https://scholars.lib.ntu.edu.tw/handle/123456789/314475
Title: | Rapid thermal post-metallization annealing in thin gate oxides | Authors: | JENN-GWO HWU | Issue Date: | 1995 | Journal Volume: | 34 | Journal Issue: | 11 | Start page/Pages: | 6008-6016 | Source: | Japanese Journal of Applied Physics, Part 1: Regular Papers \\& Short Notes \\& Review Papers | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0029404955&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/314475 |
DOI: | 10.1143/JJAP.34.6008 |
Appears in Collections: | 電機工程學系 |
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