https://scholars.lib.ntu.edu.tw/handle/123456789/342844
Title: | Fabrication of concave gratings by curved surface UV-nanoimprint lithography | Authors: | Yung-Pin Chen Yuet-Ping Lee Jer-Haur Chang Lon A. Wang LON A. WANG |
Issue Date: | Sep-2008 | Journal Volume: | 26 | Journal Issue: | 5 | Start page/Pages: | 1690-1695 | Source: | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/342844 | DOI: | 10.1116/1.2968702 |
Appears in Collections: | 光電工程學研究所 |
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