https://scholars.lib.ntu.edu.tw/handle/123456789/350098
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | CHIEH-HSIUNG KUAN | zz |
dc.contributor.author | YUNG-YAW CHEN | zz |
dc.contributor.author | KUEN-YU TSAI | zz |
dc.contributor.author | JIA-YUSH YEN | zz |
dc.contributor.author | Chen, S.-Y. | en_US |
dc.contributor.author | Tsai, K.-Y. | en_US |
dc.contributor.author | Ng, H.-T. | en_US |
dc.contributor.author | Fan, C.-H. | en_US |
dc.contributor.author | Pei, T.-H. | en_US |
dc.contributor.author | Kuan, C.-H. | en_US |
dc.contributor.author | Chen, Y.-Y. | en_US |
dc.contributor.author | Yen, J.-Y. | en_US |
dc.contributor.author | CHIEH-HSIUNG KUAN | en_US |
dc.contributor.author | YUNG-YAW CHEN | en_US |
dc.date.accessioned | 2018-09-10T07:36:10Z | - |
dc.date.available | 2018-09-10T07:36:10Z | - |
dc.date.issued | 2009 | - |
dc.identifier.uri | http://www.scopus.com/inward/record.url?eid=2-s2.0-77952062777&partnerID=MN8TOARS | - |
dc.identifier.uri | http://scholars.lib.ntu.edu.tw/handle/123456789/350098 | - |
dc.language | en | en |
dc.relation.ispartof | Proceedings of SPIE - The International Society for Optical Engineering | en_US |
dc.source | AH-Scopus to ORCID | - |
dc.title | Preliminary design of a two-dimensional electron beam position monitor system for multiple-electron-beam-direct-write lithography | - |
dc.type | conference paper | en |
dc.identifier.doi | 10.1117/12.837048 | - |
dc.identifier.scopus | 2-s2.0-77952062777 | - |
dc.relation.journalvolume | 7520 | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.openairetype | conference paper | - |
item.grantfulltext | none | - |
crisitem.author.dept | Biomedical Electronics and Bioinformatics | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | FinTech Center | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.dept | Biomedical Electronics and Bioinformatics | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | FinTech Center | - |
crisitem.author.orcid | 0000-0002-4438-5243 | - |
crisitem.author.orcid | 0000-0002-7611-4384 | - |
crisitem.author.orcid | 0000-0002-2531-1716 | - |
crisitem.author.orcid | 0000-0001-8795-9211 | - |
crisitem.author.orcid | 0000-0002-4438-5243 | - |
crisitem.author.orcid | 0000-0002-7611-4384 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
顯示於: | 電機工程學系 |
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