https://scholars.lib.ntu.edu.tw/handle/123456789/350098
Title: | Preliminary design of a two-dimensional electron beam position monitor system for multiple-electron-beam-direct-write lithography | Authors: | CHIEH-HSIUNG KUAN YUNG-YAW CHEN KUEN-YU TSAI JIA-YUSH YEN Chen, S.-Y. Tsai, K.-Y. Ng, H.-T. Fan, C.-H. Pei, T.-H. Kuan, C.-H. Chen, Y.-Y. Yen, J.-Y. CHIEH-HSIUNG KUAN YUNG-YAW CHEN |
Issue Date: | 2009 | Journal Volume: | 7520 | Source: | Proceedings of SPIE - The International Society for Optical Engineering | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-77952062777&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/350098 |
DOI: | 10.1117/12.837048 |
Appears in Collections: | 電機工程學系 |
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