https://scholars.lib.ntu.edu.tw/handle/123456789/350398
Title: | The RF characteristics of micromachined coplanar waveguide in 0.13 μm CMOS technology by CMOS compatible ICP dry etching | Authors: | Wang, T. Lu, S.-S. Lin, Y.-S. Juang, Y.-Z. Huang, G.-W. SHEY-SHI LU |
Issue Date: | 2009 | Journal Volume: | 51 | Journal Issue: | 11 | Start page/Pages: | 2665-2668 | Source: | Microwave and Optical Technology Letters | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-70349092602&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/350398 |
DOI: | 10.1002/mop.24693 |
Appears in Collections: | 電機工程學系 |
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