https://scholars.lib.ntu.edu.tw/handle/123456789/359322
Title: | Iterative finite-difference method for analyzing fabrication errors of lens-misaligned electron-beam direct-write lithography system | Authors: | Yen-Min Lee Jia-Han Li Sheng-Yung Chen Shiau-Yi Ma Kuen-Yu Tsai Tony W. H. Sheu Jia-Yush Yen KUEN-YU TSAI |
Issue Date: | Nov-2010 | Start page/Pages: | 12D-11-8 | Source: | International Microprocesses and Nanotechnology Conference 2010 | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/359322 |
Appears in Collections: | 電機工程學系 |
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