https://scholars.lib.ntu.edu.tw/handle/123456789/405639
Title: | Fogging Effect Aware Placement in Electron Beam Lithography | Authors: | Huang, Y.-C. Chang, Y.-W. |
Issue Date: | 2017 | Journal Volume: | Part 128280 | Source: | Design Automation Conference | URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85023642530&doi=10.1145%2f3061639.3062252&partnerID=40&md5=290fc1f6ffca2067d51a711a4b17d0b8 https://scholars.lib.ntu.edu.tw/handle/123456789/405639 |
DOI: | 10.1145/3061639.3062252 |
Appears in Collections: | 電子工程學研究所 |
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