https://scholars.lib.ntu.edu.tw/handle/123456789/498860
Title: | Fabrication of polysilicon thin-film transistors using nickel/copper double-layer-induced lateral crystallization | Authors: | Chen, C.-C. Yang, B.-C. Lee, S.-C. SI-CHEN LEE |
Issue Date: | 2005 | Journal Volume: | 23 | Journal Issue: | 2 | Start page/Pages: | 513-518 | Source: | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/498860 | DOI: | 10.1116/1.1875312 |
Appears in Collections: | 電機工程學系 |
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