https://scholars.lib.ntu.edu.tw/handle/123456789/501078
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Tsai, M.-F. | en_US |
dc.contributor.author | Chang, S.-J. | en_US |
dc.contributor.author | Chen, C.C.P. | en_US |
dc.contributor.author | Melvin III, L.S. | en_US |
dc.contributor.author | CHUNG-PING CHEN | en_US |
dc.date.accessioned | 2020-06-11T06:46:02Z | - |
dc.date.available | 2020-06-11T06:46:02Z | - |
dc.date.issued | 2009 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/501078 | - |
dc.relation.ispartof | Proceedings of SPIE - The International Society for Optical Engineering | - |
dc.title | Abbe-PCA (Abbe-Hopkins): Microlithography aerial image analytical compact kernel generation based on principle component analysis | en_US |
dc.type | conference paper | en |
dc.identifier.doi | 10.1117/12.814419 | - |
dc.identifier.scopus | 2-s2.0-65849270205 | - |
dc.identifier.url | https://www.scopus.com/inward/record.uri?eid=2-s2.0-65849270205&doi=10.1117%2f12.814419&partnerID=40&md5=4a63745068e013a4614122d7e2235f4f | - |
dc.relation.journalvolume | 7274 | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.openairetype | conference paper | - |
item.grantfulltext | none | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Center for Artificial Intelligence and Advanced Robotics | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
顯示於: | 電機工程學系 |
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