https://scholars.lib.ntu.edu.tw/handle/123456789/501078
Title: | Abbe-PCA (Abbe-Hopkins): Microlithography aerial image analytical compact kernel generation based on principle component analysis | Authors: | Tsai, M.-F. Chang, S.-J. Chen, C.C.P. Melvin III, L.S. CHUNG-PING CHEN |
Issue Date: | 2009 | Journal Volume: | 7274 | Source: | Proceedings of SPIE - The International Society for Optical Engineering | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/501078 | DOI: | 10.1117/12.814419 |
Appears in Collections: | 電機工程學系 |
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