公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
2007 | Real-time spatial control of photoresist development rate | Arthur Tay; Weng-Khuen Ho; Ni Hu; Choon-Meng Kiew; Kuen-Yu Tsai; KUEN-YU TSAI | Proc. SPIE , Metrology, Inspection, and Process Control for Microlithography | 0 | 0 | |
2006 | Real-time spatial control of steady-state wafer temperature during thermal processing in microlithography | Arthur Tay; Weng-Khuen Ho; Ni Hu; Kuen-Yu Tsai; Ying Zhou; KUEN-YU TSAI | Proc. SPIE, Data Analysis and Modeling for Process Control II | 0 | 0 | |
2009 | Selection of Gaussian-beam and raster-scan parameters in electron-beam direct-write lithography considering device patterning and performance variability | Hoi-Tou Ng; Chun-Hung Liu; Hsing-Hong Chen; Kuen-Yu Tsai; KUEN-YU TSAI | Advanced Lithography 2009 | |||
1999 | Servo system design of a high-resolution piezo-driven fine stage for step-and-repeat microlithography systems | Kuen-Yu Tsai; Jia-Yush Yen; KUEN-YU TSAI | The 25th Annual Conference of the IEEE Industrial Electronics Society, 1999. IECON '99 | 22 | 0 | |
2014 | Simulation and experiment of speckle reduction by the beam splitting method on a pico-projection system | Ting-Hang Pei; Feng-Chun Yeh; Kuen-Yu Tsai; Jia-Han Li; Zu-Rong Liu; Chang-Li Hung; KUEN-YU TSAI | Advanced Materials Research | 2 | 0 | |
2012 | Solution-refined method for solving large-scale computation problems: Taking the Laplace's equation as an example | Yen-Min Lee; Jia-Han Li; Tony Wen-Hann Sheu; Kuen-Yu Tsai; Jia-Yush Yen; KUEN-YU TSAI | NCHC High-performance Computing Conference | |||
2012 | Solution-refined method for solving large-scale computation problems: Taking the Laplace’s equation as an example | Yen-Min Lee; JIA-HAN LI ; Tony Wen-Hann Sheu; Kuen-Yu Tsai; Jia-Yush Yen | 2012 NCHC High-performance Computing Conference (2012 NCHC HPC) | |||
2013 | Solution-refined method for solving large-scale electrostatic problems: Taking the electron-beam direct-write lithography system as an example | Yen-Min Lee; JIA-HAN LI ; Tony Wen-Hann Sheu; Kuen-Yu Tsai; Jia-Yu Yen | 13rd Conference on Computational Mathematics and Annual Meetings of TWSIAM | |||
2010 | Stochastic simulation of photon scattering for EUV mask defect inspection | Ting-Hang Pei; Kuen-Yu Tsai; KUEN-YU TSAI ; JIA-HAN LI | Advanced Lithography 2010 - Proc. SPIE | 0 | 0 | |
2013 | Study of etching bias modeling and correction strategies for compensation of patterning process effects | Philip C. W. Ng; Kuen-Yu Tsai; Lawrence S. Melvin III; KUEN-YU TSAI | Microelectronic Engineering | 1 | 1 | |
2012 | Study of etching bias modeling and correction strategies for patterning processes | Philip C.W. Ng; Kuen-Yu Tsai; Lawrence S. Melvin III; KUEN-YU TSAI | 38th International Micro & Nano Engineering Conference (MNE 2012) | |||
2014 | Supplementary zones-surrounded Fresnel zone plate | Yen-Min Lee; Szu-Hung Chen; Chen-Pin Hsu; Pei-Chuen Chiou; Kuen-Yu Tsai; Tien-Tung Chung; Cheng-Han Tsai; Zhan-Yu Liu; JIA-HAN LI | JSAP-OSA Joint Symposium 2014 (The 75th JSAP Autumn Meeting 2014) | |||
0 | System and Method for Estimating Change of Status of Particle Beams | Kuen-Yu Tsai; Sheng-Yung Chen; Jia-Yush Yen; Yung-Yaw Chen; Chi-Hsiang Fan; KUEN-YU TSAI | ||||
2014 | System and Method for Estimating Change of Status of Particle Beams (粒子束狀態改變監測系統及其方法) | Kuen-Yu Tsai; Sheng-Yung Chen; Jia-Yush Yen; Yung-Yaw Chen; Chi-Hsiang Fan; KUEN-YU TSAI | ||||
2012 | The effect of NBTI on 3D integrated circuits | Cheng-Hong Lin; Yi-Chang Lu; Chin-Khai Tang; Kuen-Yu Tsai; YI-CHANG LU ; KUEN-YU TSAI | Electrical Design of Advanced Packaging and Systems Symposium (EDAPS), 2012 IEEE | 2 | 0 | |
2009 | Using transmission line theory to calculate equivalent refractive index of EUV mask multilayer structures for efficient scattering simulation by finite-difference time-domain method | Yen-Min Lee; Jia-Han Li; Philip C. W. Ng; Ting-Han Pei; Fu-Min Wang; Kuen-Yu Tsai; KUEN-YU TSAI ; JIA-HAN LI | Lithography Asia 2009, Proc. SPIE | 0 | 0 |