Issue Date | Title | Author(s) | Source | scopus | WOS | Fulltext/Archive link |
---|---|---|---|---|---|---|
2007 | Young's modulus of high aspect ratio Si3N4 nano-thickness membrane | Chen, P.-H.; Yang, C.-H.; Tsai, C.-Y.; Chang, T.-L.; Hsu, W.-C.; PING-HEI CHEN | 2007 7th IEEE International Conference on Nanotechnology | 2 | 0 |