Publication:
Hydrolysis-Tolerant Hybrid Bonding in Ambient Atmosphere for 3D Integration

Date

2019

Authors

Shigetou, A.;Yang, T.H.;Kao, C.R.

C. ROBERT KAO

URI

https://www.scopus.com/inward/record.url?eid=2-s2.0-85084113427&partnerID=40&md5=7cae8cd28088d0bd10d27f46c4b9841b
https://scholars.lib.ntu.edu.tw/handle/123456789/546628

Collections

Materials Science and Engineering / 材料科學與工程學系