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College of Engineering / 工學院
Materials Science and Engineering / 材料科學與工程學系
Hydrolysis-Tolerant Hybrid Bonding in Ambient Atmosphere for 3D Integration
Details
Hydrolysis-Tolerant Hybrid Bonding in Ambient Atmosphere for 3D Integration
Journal
IEEE 2019 International 3D Systems Integration Conference, 3DIC 2019
Date Issued
2019
Author(s)
Shigetou, A.
Yang, T.H.
C. ROBERT KAO
DOI
10.1109/3DIC48104.2019.9058786
URI
https://www.scopus.com/inward/record.url?eid=2-s2.0-85084113427&partnerID=40&md5=7cae8cd28088d0bd10d27f46c4b9841b
https://scholars.lib.ntu.edu.tw/handle/123456789/546628
Type
conference paper