Strain engineering of nanoscale Si MOS devices

Journal

Thin Solid Films

Journal Volume

518

Journal Issue

6 SUPPL. 1

Date Issued

2010

Author(s)

Huang, J.

Chang, S.-T.

Hsieh, B.-F.

Liao, M.-H.

Wang, W.-C.

Lee, C.-C.

DOI

10.1016/j.tsf.2009.10.098

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447976

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-73649113143&doi=10.1016%2fj.tsf.2009.10.098&partnerID=40&md5=e97624279c945c821d91d4fcc9df5434

Type

journal article