Enhancing fracture strength of thinned silicon dies by a hybrid micromachining method

Journal

International Journal of Abrasive Technology

Journal Volume

4

Journal Issue

4

Pages

290-303

Date Issued

2011

Author(s)

Lin, C.-C.

Young, H.-T.

Tang, C.-W.

Tsai, M.-Y.

DOI

10.1504/IJAT.2011.044503

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-84863126927&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/363607

Type

journal article