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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Enhancing fracture strength of thinned silicon dies by a hybrid micromachining method
Details
Enhancing fracture strength of thinned silicon dies by a hybrid micromachining method
Journal
International Journal of Abrasive Technology
Journal Volume
4
Journal Issue
4
Pages
290-303
Date Issued
2011
Author(s)
Lin, C.-C.
Young, H.-T.
Tang, C.-W.
Tsai, M.-Y.
HONG-TSU YOUNG
DOI
10.1504/IJAT.2011.044503
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-84863126927&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/363607
Type
journal article