https://scholars.lib.ntu.edu.tw/handle/123456789/288948
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | JENN-GWO HWU | en |
dc.creator | Hwu, J.-G. and Ho, I.-H. and Chou, S.-P. | - |
dc.date.accessioned | 2018-09-10T03:26:48Z | - |
dc.date.available | 2018-09-10T03:26:48Z | - |
dc.date.issued | 1990 | - |
dc.identifier.uri | http://www.scopus.com/inward/record.url?eid=2-s2.0-0025502702&partnerID=MN8TOARS | - |
dc.identifier.uri | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0025502702&doi=10.1016%2f0038-1101%2890%2990037-F&partnerID=40&md5=7e20a32d2b07368a5f6d77c5cd856e9d | - |
dc.language | en | en |
dc.relation.ispartof | Solid State Electronics | - |
dc.source | AH | - |
dc.subject.other | Ellipsometry; Thin-Oxide Thickness Measurement; Wafer Rotation Method; Oxides | - |
dc.title | Thin-oxide thickness measurement in ellipsometry by a wafer rotation method | - |
dc.type | journal article | en |
dc.identifier.doi | 10.1016/0038-1101(90)90037-F | - |
dc.identifier.scopus | 2-s2.0-0025502702 | - |
dc.relation.pages | 1327-1328 | - |
dc.relation.journalvolume | 33 | - |
dc.relation.journalissue | 10 | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.openairetype | journal article | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.orcid | 0000-0001-9688-0812 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
顯示於: | 電機工程學系 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。