https://scholars.lib.ntu.edu.tw/handle/123456789/301815
Title: | Electrical characterization and process control of cost-effective high-k aluminum oxide gate dielectrics prepared by anodization followed by furnace annealing | Authors: | JENN-GWO HWU | Issue Date: | 2003 | Journal Volume: | 50 | Journal Issue: | 7 | Start page/Pages: | 1658-1664 | Source: | IEEE Transactions on Electron Devices | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0041525422&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/301815 |
DOI: | 10.1109/TED.2003.813904 |
Appears in Collections: | 電機工程學系 |
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