https://scholars.lib.ntu.edu.tw/handle/123456789/307553
Title: | Eliminating the surface inversion layer under the field oxide by low pressure rapid thermal annealing | Authors: | JENN-GWO HWU | Issue Date: | 1994 | Journal Volume: | 141 | Journal Issue: | 9 | Start page/Pages: | 2498-2502 | Source: | Journal of the Electrochemical Society | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0028497229&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/307553 |
DOI: | 10.1149/1.2055150 |
Appears in Collections: | 電機工程學系 |
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