https://scholars.lib.ntu.edu.tw/handle/123456789/314477
Title: | Preparation of fluorinated gate oxides by liquid phase deposition following rapid thermal oxidation | Authors: | JENN-GWO HWU | Issue Date: | 1995 | Journal Volume: | 66 | Source: | Applied Physics Letters | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-36449006319&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/314477 |
Appears in Collections: | 電機工程學系 |
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