https://scholars.lib.ntu.edu.tw/handle/123456789/316331
Title: | Scalable highly-anistropic reactive ion etch on Si for nanophotonics | Authors: | Liang, E.-Z. CHING-FUH LIN |
Issue Date: | 2005 | Source: | Conference on Lasers and Electro-Optics Europe | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-42749102299&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/316331 |
DOI: | 10.1109/CLEOE.2005.1568381 |
Appears in Collections: | 電機工程學系 |
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