https://scholars.lib.ntu.edu.tw/handle/123456789/340844
Title: | Effective energy densities in KrF excimer laser reformation as a sidewall smoothing technique | Authors: | Liang, Eih-Zhe Hung, Shih-Che Hsieh, Ya-Ping CHING-FUH LIN |
Issue Date: | 2008 | Journal Volume: | 26 | Journal Issue: | 1 | Start page/Pages: | 110-116 | Source: | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-38849168311&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/340844 |
DOI: | 10.1116/1.2825163 |
Appears in Collections: | 電機工程學系 |
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