https://scholars.lib.ntu.edu.tw/handle/123456789/350139
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Hung, Shih-Che | en_US |
dc.contributor.author | Shiu, Shu-Chia | en_US |
dc.contributor.author | Chao, Cha-Hsin | en_US |
dc.contributor.author | CHING-FUH LIN | en_US |
dc.date.accessioned | 2018-09-10T07:36:17Z | - |
dc.date.available | 2018-09-10T07:36:17Z | - |
dc.date.issued | 2009 | - |
dc.identifier.uri | http://www.scopus.com/inward/record.url?eid=2-s2.0-79953859779&partnerID=MN8TOARS | - |
dc.identifier.uri | http://scholars.lib.ntu.edu.tw/handle/123456789/350139 | - |
dc.language | en | en |
dc.relation | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 27(3), 1156-1160 | en |
dc.relation.ispartof | Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics | en_US |
dc.source | AH-Scopus to ORCID | - |
dc.title | Fabrication of crystalline Si spheres with atomic-scale surface smoothness using homogenized KrF excimer laser reformation system | - |
dc.type | journal article | en |
dc.identifier.doi | 10.1116/1.3137963 | - |
dc.relation.pages | 1156-1160 | - |
dc.relation.journalvolume | 27 | - |
dc.relation.journalissue | 3 | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.openairetype | journal article | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
crisitem.author.dept | Photonics and Optoelectronics | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.orcid | 0000-0003-3787-2163 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
顯示於: | 電機工程學系 |
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