https://scholars.lib.ntu.edu.tw/handle/123456789/359321
Title: | Fabrication of metrology test structures with programmed line edge roughness using electron beam direct write | Authors: | Fu-Min Wang Kuen-Yu Tsai Jia-Han Li Alek C. Chen Yen-Min Lee Yu-Tian Shen Hsin-Hung Cheng Chieh-Hsiang Kuan KUEN-YU TSAI |
Issue Date: | Nov-2010 | Start page/Pages: | 12D-11-58 | Source: | International Microprocesses and Nanotechnology Conference 2010 | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/359321 | DOI: | 10.1117/12.814181 |
Appears in Collections: | 電機工程學系 |
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