https://scholars.lib.ntu.edu.tw/handle/123456789/362678
Title: | Line stitching in servo-assisted electron beam lithography system | Authors: | Yen, J.-Y. Chen, L.-S. Chiu, P. JIA-YUSH YEN |
Issue Date: | 2011 | Start page/Pages: | 397-402 | Source: | IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-80053979240&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/362678 |
DOI: | 10.1109/AIM.2011.6027026 |
Appears in Collections: | 機械工程學系 |
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