https://scholars.lib.ntu.edu.tw/handle/123456789/409166
Title: | Fluorocarbon Films Deposited by c-C4F8/N2/Ar Plasmas: The Effect of N2-addition on Gas Phase Kinetics and Surface Chemistry | Authors: | P. K. Kao C. C. Hsu |
Issue Date: | 2013 | Conference: | AVS 60th International Symposium, Long Beach, CA, USA, Oct, 2013.AVS | Description: | Poster |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/409166 |
Appears in Collections: | 化學工程學系 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.